Multisensor coordinate measurement technology applied to microprecision dimensional metrology problems

Abstract

The miniaturization of components and structures and the increasing demand for more accurate measurements have led to ongoing development in the field of dimensional metrology. The development of new measuring sensors mounted on coordinate measuring machines, has enabled metrologists to handle the current dimensional engineering challenges. New probing systems, which combine optical and mechanical principles and provide three-dimensional information about micro-scale features in micro- and meso-scale components, are outlined in this paper. Application cases are reported and their practical issues discussed under a metrology view.


Reference
YAMANAKA, D. M.; BALDO, C. R.; DIRK, A. Multisensor coordinate measurement technology applied to microprecision dimensional metrology problems. In: CONGRESSO INTERNACIONAL DE METROLOGIA MECÂNICA, 2., 2011, Natal. Proceedings…

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